Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8937705 | Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device | Wim Tjibbo Tel, Hans Van Der Laan, Todd Davis, Todd Hiar, Theodore Paxton | 2015-01-20 |
| 7981595 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Davis, Todd Hiar, Steven George Hansen, James J. Hunter | 2011-07-19 |
| 7906270 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Davis, Todd Hiar, Steven George Hansen | 2011-03-15 |
| 7781149 | Reduced pitch multiple exposure process | Theodore Paxton, Steven George Hansen, Todd Davis, Todd Hiar, James J. Hunter | 2010-08-24 |
| 7738075 | Lithographic attribute enhancement | Todd Hiar, Theodore Paxton, Todd Davis | 2010-06-15 |
| 7248332 | Lithographic apparatus and device manufacturing method | — | 2007-07-24 |
| 7230674 | Lithographic apparatus and device manufacturing method | Mark Kroon, Michael Cornelis Van Beek, Peter Dirksen, Ralph Kurt | 2007-06-12 |
| 7145641 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Michael Cornelis Van Beek, Peter Dirksen, Ralph Kurt | 2006-12-05 |
| 7142287 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Michael Cornelis Van Beek, Peter Dirksen, Ralph Kurt | 2006-11-28 |
| 6927835 | Adaptive thermal control of lithographic chemical processes | Wim Tjibbo Tel, Stephan Ewald Sinkwitz | 2005-08-09 |