Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8937705 | Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device | Wim Tjibbo Tel, Hans Van Der Laan, Cassandra Owen, Todd Davis, Theodore Paxton | 2015-01-20 |
| 7981595 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Davis, Cassandra Owen, Steven George Hansen, James J. Hunter | 2011-07-19 |
| 7906270 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Davis, Cassandra Owen, Steven George Hansen | 2011-03-15 |
| 7781149 | Reduced pitch multiple exposure process | Theodore Paxton, Steven George Hansen, Cassandra Owen, Todd Davis, James J. Hunter | 2010-08-24 |
| 7738075 | Lithographic attribute enhancement | Theodore Paxton, Todd Davis, Cassandra Owen | 2010-06-15 |
| 7274429 | Integrated lithographic fabrication cluster | Theodore Paxton, Todd Davis | 2007-09-25 |
| 7019268 | Wafer processing apparatus and method of use | Theodore Paxton | 2006-03-28 |
| 6873938 | Adaptive lithographic critical dimension enhancement | Theodore Paxton, Wim Tjibbo Tel, Todd Davis | 2005-03-29 |