Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Olger Victor Zwier, Maurits Van Der Schaar, Hilko Dirk Bos, S. M. Masudur Rahman Al Arif, Henricus Wilhelmus Maria Van Buel +6 more | 2025-04-15 |
| 12228862 | Selection of measurement locations for patterning processes | Wim Tjibbo Tel, Marinus Jochemsen, Stefan Hunsche | 2025-02-18 |
| 11681229 | Selection of measurement locations for patterning processes | Wim Tjibbo Tel, Marinus Jochemsen, Stefan Hunsche | 2023-06-20 |
| 10962886 | Selection of measurement locations for patterning processes | Wim Tjibbo Tel, Marinus Jochemsen, Stefan Hunsche | 2021-03-30 |
| 10635004 | Correction using stack difference | Aiqin JIANG, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Bart Visser, Martin Jacobus Johan Jak | 2020-04-28 |
| 10578982 | Substrate measurement recipe design of, or for, a target including a latent image | Mir Homayoun Shahrjerdy | 2020-03-03 |
| 10551750 | Metrology method and apparatus and associated computer product | Adam Jan URBANCZYK, Grzegorz Grzela, Alberto Da Costa Assafrao, Chien-Hung Tseng, Jay Jianhui Chen | 2020-02-04 |
| 10310388 | Metrology method and apparatus and associated computer product | Adam Jan URBANCZYK, Grzegorz Grzela, Alberto Da Costa Assafrao, Chien-Hung Tseng, Jay Jianhui Chen | 2019-06-04 |
| 9958789 | Method of metrology, inspection apparatus, lithographic system and device manufacturing method | Peter Hanzen Wardenier, Frank Staals, Jean-Pierre Agnes Henricus Marie Vaessen | 2018-05-01 |
| 8937705 | Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device | Wim Tjibbo Tel, Cassandra Owen, Todd Davis, Todd Hiar, Theodore Paxton | 2015-01-20 |
| 8773657 | Method to determine the value of process parameters based on scatterometry data | Rene Hubert Jacobus Carpaij, Hugo Augustinus Joseph Cramer, Antoine Gaston Marie Kiers | 2014-07-08 |
| 8717540 | Calculating a laser metric within a lithographic apparatus and method thereof | Carsten Kohler, Frank Staals, Laurentius Cornelius De Winter, Herman Philip Godfried | 2014-05-06 |
| 8570489 | Lithographic projection apparatus and method of compensating perturbation factors | Jan Bernard Plechelmus Van Schoot, Antonius Johannes Josephus Van Dijsseldonk, Diederik Jan Maas | 2013-10-29 |
| 8554510 | Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product | Frank Staals, Hans Butler, Gerardus Carolus Johannus Hofmans, Sven Gunnar Krister Magnusson | 2013-10-08 |
| 8279405 | Lithographic apparatus and device manufacturing method | Marcel Mathijs Theodore Marie Dierichs, Hendrikus Robertus Marie Van Greevenbroek | 2012-10-02 |
| 8208122 | Method of measuring a lithographic projection apparatus | Frank Staals, Gerardus Carolus Johannus Hofmans, Sven Gunnar Krister Magnusson | 2012-06-26 |
| 8134683 | Device manufacturing method, computer program and lithographic apparatus | Laurentius Cornelius De Winter | 2012-03-13 |
| 7697116 | Lithographic apparatus and device manufacturing method | Marcel Mathijs Theodore Marie Dierichs, Hendrikus Robertus Marie Van Greevenbroek | 2010-04-13 |
| 7663741 | Lithographic apparatus, device manufacturing method, calibration method and computer program product | Christian Wagner | 2010-02-16 |
| 7505116 | Lithographic apparatus and device manufacturing method | Jan Evert Van Der Werf, George Arie Jan Fockert | 2009-03-17 |
| 7459690 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2008-12-02 |
| 7443486 | Method for predicting a critical dimension of a feature imaged by a lithographic apparatus | Koen Van Ingen Schenau, Maurice Henricus Franciscus Janssen, Antoine Gaston Marie Kiers, Peter Clement Paul Vanoppen | 2008-10-28 |
| 7403293 | Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method | Henricus Petrus Maria Pellemans, Arie Jeffrey Den Boef, Wilhelmus Maria Corbeij | 2008-07-22 |
| 7382438 | Lithographic apparatus and device manufacturing method | Johannes Anna Quaedackers | 2008-06-03 |
| 7312860 | Test pattern, inspection method, and device manufacturing method | Arie Jeffrey Den Boef, Antonius Johannes Josephus Van Dijsseldonk, Mircea Dusa, Antoine Gaston Marie Kiers | 2007-12-25 |