Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604419 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Paul Christiaan Hinnen, Nicolas Mauricio Weiss +3 more | 2023-03-14 |
| 11022897 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Paul Christiaan Hinnen, Nicolas Mauricio Weiss +3 more | 2021-06-01 |
| 10705430 | Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Nicolas Mauricio Weiss | 2020-07-07 |
| 10691030 | Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method | Frank Staals, Eric Brouwer, Carlo Cornelius Maria Luijten | 2020-06-23 |
| 10132763 | Inspection method and apparatus, lithographic system and device manufacturing method | Hugo Augustinus Joseph Cramer, Robert John Socha, Patricius Aloysius Jacobus Tinnemans | 2018-11-20 |
| 9958789 | Method of metrology, inspection apparatus, lithographic system and device manufacturing method | Peter Hanzen Wardenier, Frank Staals, Hans Van Der Laan | 2018-05-01 |