Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604419 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Paul Christiaan Hinnen, Jean-Pierre Agnes Henricus Marie Vaessen +3 more | 2023-03-14 |
| 11448974 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Olger Victor Zwier | 2022-09-20 |
| 11022897 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Paul Christiaan Hinnen, Jean-Pierre Agnes Henricus Marie Vaessen +3 more | 2021-06-01 |
| 10990020 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Olger Victor Zwier | 2021-04-27 |
| 10859923 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-12-08 |
| 10705430 | Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method | Nicolas Mauricio Weiss, Jean-Pierre Agnes Henricus Marie Vaessen | 2020-07-07 |
| 10564552 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-02-18 |