Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11698346 | Methods and apparatus for monitoring a manufacturing process, inspection apparatus, lithographic system, device manufacturing method | Ioana Sorina Barbu, Maurits Van Der Schaar, Alberto Da Costa Assafrao | 2023-07-11 |
| 11385553 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar +6 more | 2022-07-12 |
| 11318104 | Microcapsule and production method thereof | Mehmet Dogan ASIK | 2022-05-03 |
| 11003099 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Patrick Warnaar, Stefan Cornelis Theodorus Van Der Sanden | 2021-05-11 |
| 10996570 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar +6 more | 2021-05-04 |
| 10859923 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-12-08 |
| 10794693 | Metrology method, apparatus and computer program | Farzad Farhadzadeh, Mohammadreza Hajiahmadi, Maurits Van Der Schaar | 2020-10-06 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Alberto Da Costa Assafrao, Marc Johannes Noot, Simon Gijsbert Josephus Mathijssen +1 more | 2020-07-07 |
| 10564552 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-02-18 |
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Maurits Van Der Schaar, Patrick Warnaar, Martin Jacobus Johan Jak, Mohammadreza Hajiahmadi, Grzegorz Grzela +1 more | 2019-11-19 |
| 10437163 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Patrick Warnaar, Stefan Cornelis Theodorus Van Der Sanden | 2019-10-08 |
| 9940703 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Patricius Aloysius Jacobus Tinnemans | 2018-04-10 |
| 9633427 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Patricius Aloysius Jacobus Tinnemans | 2017-04-25 |