Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Maurits Van Der Schaar, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif, Henricus Wilhelmus Maria Van Buel +6 more | 2025-04-15 |
| 12242203 | Target for measuring a parameter of a lithographic process | Maurits Van Der Schaar, Patrick Warnaar, Franciscus Godefridus Casper Bijnen | 2025-03-04 |
| 12019377 | Target for measuring a parameter of a lithographic process | Maurits Van Der Schaar, Patrick Warnaar | 2024-06-25 |
| 12013647 | Metrology method | Simon Gijsbert Josephus Mathijssen, Marc Johannes Noot, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Grzegorz Grzela +4 more | 2024-06-18 |
| 11982946 | Metrology targets | Nikhil Mehta, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij, Hugo Augustinus Joseph Cramer, Jeroen COTTAAR +1 more | 2024-05-14 |
| 11448974 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Gonzalo Roberto Sanguinetti | 2022-09-20 |
| 11385553 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Nitesh Pandey, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2022-07-12 |
| 10996570 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Nitesh Pandey, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2021-05-04 |
| 10990020 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Gonzalo Roberto Sanguinetti | 2021-04-27 |
| 10606178 | Method of measuring a target, and metrology apparatus | — | 2020-03-31 |