Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12242203 | Target for measuring a parameter of a lithographic process | Maurits Van Der Schaar, Patrick Warnaar, Olger Victor Zwier | 2025-03-04 |
| 12032305 | Alignment method and associated alignment and lithographic apparatuses | Edo Maria Hulsebos | 2024-07-09 |
| 11966166 | Measurement apparatus and a method for determining a substrate grid | Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Robert John Socha, Youping Zhang | 2024-04-23 |
| 11927892 | Alignment method and associated alignment and lithographic apparatuses | Edo Maria Hulsebos | 2024-03-12 |
| 11874103 | Measurement apparatus | Junichi KANEHARA, Stefan Carolus Jacobus Antonius Keij, Thomas Augustus Mattaar, Petrus Franciscus Van Gils | 2024-01-16 |
| 11803130 | Phase modulators in alignment to decrease mark size | Muhsin Eralp, Simon Reinald HUISMAN, Arie Jeffrey Den Boef | 2023-10-31 |
| 11531280 | Compact alignment sensor arrangements | Tamer Elazhary, Justin Kreuzer, Krishanu SHOME | 2022-12-20 |
| 11442372 | Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool | Ralph Brinkhof | 2022-09-13 |
| 11181836 | Method for determining deformation | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans | 2021-11-23 |
| 11105619 | Measurement apparatus | Junichi KANEHARA, Stefan Carolus Jacobus Antonius Keij, Thomas Augustus Mattaar, Petrus Franciscus Van Gils | 2021-08-31 |
| 11079684 | Measurement apparatus and a method for determining a substrate grid | Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Robert John Socha, Youping Zhang | 2021-08-03 |
| 11054813 | Method and apparatus for controlling an industrial process using product grouping | Alexander Ypma, David Deckers, Richard Johannes Franciscus Van Haren, Weitian Kou | 2021-07-06 |
| 11029610 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees +11 more | 2021-06-08 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more | 2021-03-30 |
| 10901326 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas +2 more | 2021-01-26 |
| 10620549 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas +2 more | 2020-04-14 |
| 10527957 | Method and apparatus for processing a substrate in a lithographic apparatus | Cayetano Sanchez-Fabres Cobaleda, Edo Maria Hulsebos, Arie Jeffrey Den Boef, Marcel Hendrikus Maria Beems, Piotr Michał Stolarz | 2020-01-07 |
| 10527958 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more | 2020-01-07 |
| 10514620 | Alignment method | Simon Gijsbert Josephus Mathijssen, Vassili Demergis, Edo Maria Hulsebos | 2019-12-24 |
| 10474045 | Lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Patricius Aloysius Jacobus Tinnemans, Alexander Ypma, Irina Lyulina +6 more | 2019-11-12 |
| 10444647 | Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate | Augustinus Hubert Maria Boshouwers, Johannes Onvlee | 2019-10-15 |
| 10331040 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas +2 more | 2019-06-25 |
| 10151987 | Measuring method, apparatus and substrate | David Deckers, Sami Musa | 2018-12-11 |
| 10139740 | Lithographic apparatus and device manufacturing method | Edo Maria Hulsebos | 2018-11-27 |
| 9891540 | Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method | Earl William Ebert | 2018-02-13 |