Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607873 | Substrate edge detection | Eric Anthony Janda, Bernd Geh, Simon Gijsbert Josephus Mathijssen | 2020-03-31 |
| 10527957 | Method and apparatus for processing a substrate in a lithographic apparatus | Franciscus Godefridus Casper Bijnen, Edo Maria Hulsebos, Arie Jeffrey Den Boef, Marcel Hendrikus Maria Beems, Piotr Michał Stolarz | 2020-01-07 |
| 10429750 | Alignment mark recovery method and lithographic apparatus | Sanjaysingh Lalbahadoersing | 2019-10-01 |