Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675281 | Methods of alignment, overlay, configuration of marks, manufacturing of patterning devices and patterning the marks | Jin Dai | 2023-06-13 |
| 11086232 | Mark, overlay target, and methods of alignment and overlay | Beniamino Sciacca, Jia Wang | 2021-08-10 |
| 10948837 | Information determining apparatus and method | An Lin Gao, Andrey Nikipelov, Alexey Olegovich POLYAKOV, Brennan Peterson | 2021-03-16 |
| 10429750 | Alignment mark recovery method and lithographic apparatus | Cayetano Sanchez-Fabres Cobaleda | 2019-10-01 |
| 10191390 | Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus | Paul Cornelis Hubertus Aben, Jurgen Johannes Henderikus Maria Schoonus, David Deckers | 2019-01-29 |
| 8319967 | Marker structure and method of forming the same | Richard Johannes Franciscus Van Haren, Sami Musa, Patrick Warnaar, Maya Angelova Doytcheva | 2012-11-27 |
| 8243259 | Lithographic apparatus | Vitally Prosyentsov, Sami Musa, Hyun Woo Lee | 2012-08-14 |
| 8203692 | Sub-segmented alignment mark arrangement | Sami Musa, Richard Johannes Franciscus Van Haren | 2012-06-19 |
| 8072615 | Alignment method, alignment system, and product with alignment mark | Sami Musa, Richard Johannes Franciscus Van Haren, Xiuhong Wei | 2011-12-06 |
| 7598024 | Method and system for enhanced lithographic alignment | Sami Musa | 2009-10-06 |
| 7453161 | Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus | Richard Johannes Franciscus Van Haren, Henry Megens | 2008-11-18 |
| 7271073 | Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus | Richard Johannes Franciscus Van Haren, Henry Megens | 2007-09-18 |