Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8139217 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2012-03-20 |
| 7880880 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2011-02-01 |
| 7619738 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Sanjay Lalbahadoersing, Maurits Van Der Schaar | 2009-11-17 |
| 7453161 | Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus | Richard Johannes Franciscus Van Haren, Sanjaysingh Lalbahadoersing | 2008-11-18 |
| 7439531 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2008-10-21 |
| 7332732 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2008-02-19 |
| 7330261 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Sanjay Lalbahadoersing, Maurits Van Der Schaar | 2008-02-12 |
| 7329888 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2008-02-12 |
| 7297971 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2007-11-20 |
| 7271073 | Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus | Richard Johannes Franciscus Van Haren, Sanjaysingh Lalbahadoersing | 2007-09-18 |