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2014-03-18 |
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Lithographic apparatus and device manufacturing method |
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2013-03-12 |
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Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method |
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2012-09-11 |
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Alignment systems and methods for lithographic systems |
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2012-03-20 |
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Marker structure and method for controlling alignment of layers of a multi-layered substrate |
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2011-02-01 |
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Alignment systems and methods for lithographic systems |
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2011-02-01 |
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Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly |
Jan-Peter Hauschild, Arie Jeffrey Den Boef, Martinus Hendrikus Antonius Leenders, Uwe Mickan, Roeland Nicolaas Maria Vanneer |
2010-11-16 |
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Marker structure and method for controlling alignment of layers of a multi-layered substrate |
Richard Johannes Franciscus Van Haren, Arie Jeffrey Den Boef, Maurits Van Der Schaar, Bartolomeus Petrus Rijpers |
2009-12-08 |
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Lithographic apparatus and device manufacturing method |
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2009-08-18 |
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Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly |
Jan-Peter Hauschild, Arie Jeffrey Den Boef, Martinus Hendrikus Antonius Leenders, Uwe Mickan, Roeland Nicolaas Maria Vanneer |
2009-04-14 |
| 7476490 |
Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method |
Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Rene Monshouwer |
2009-01-13 |
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Alignment systems and methods for lithographic systems |
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2008-10-21 |
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Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more |
2008-02-19 |
| 7329888 |
Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more |
2008-02-12 |
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Alignment systems and methods for lithographic systems |
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2007-11-20 |
| 6876436 |
Interferometric alignment system for use in vacuum-based lithographic apparatus |
— |
2005-04-05 |
| 6507388 |
Interferometric alignment system for use in vacuum-based lithographic apparatus |
— |
2003-01-14 |