Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8717535 | SLM calibration | Huibert Visser, Martinus Hendricus Hoeks, Borgert Kruizinga, Bob Streefkerk, Patricius Aloysius Jacobus Tinnemans +4 more | 2014-05-06 |
| 7834975 | Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly | Jacobus Burghoorn, Jan-Peter Hauschild, Arie Jeffrey Den Boef, Martinus Hendrikus Antonius Leenders, Uwe Mickan | 2010-11-16 |
| 7518706 | Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly | Jan-Peter Hauschild, Arie Jeffrey Den Boef, Martinus Hendrikus Antonius Leenders, Uwe Mickan, Jacobus Burghoorn | 2009-04-14 |
| 7280228 | System and method of measurement, system and method of alignment, lithographic apparatus and method | Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Jeroen Thomas Broekhuijse, Sigurd Dressler +3 more | 2007-10-09 |
| 7116401 | Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method | Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam | 2006-10-03 |
| 6987555 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Paulus Antonius Andreas Teunissen, Gerrit Johannes Nijmeijer, Rene Marinus Gerardus Johan Queens, Frank Staals, Robert Jan Van Wijk | 2006-01-17 |