Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11249404 | System and method for measurement of alignment | Emil Peter Schmitt-Weaver, Kaustuve Bhattacharyya, Wolfgang Henke, Wim Tjibbo Tel, Theodorus Franciscus Adrianus Maria Linschoten | 2022-02-15 |
| 11150565 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Wolfgang Henke | 2021-10-19 |
| 10845719 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Wolfgang Henke, Arend Johannes Donkerbroek, Jeroen COTTAAR | 2020-11-24 |
| 10684557 | Method for adjusting actuation of a lithographic apparatus | Emil Peter Schmitt-Weaver | 2020-06-16 |
| 10558130 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Erik Johan Koop, Reiner Maria Jungblut | 2020-02-11 |
| 10503087 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Arend Johannes Donkerbroek, Pietro Andricciola, Ewoud Frank Van West | 2019-12-10 |
| 10274849 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Erik Johan Koop, Reiner Maria Jungblut | 2019-04-30 |
| 7646471 | Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby | Paulus Antonius Andreas Teunissen, Petrus Johannes Maria Broodbakker | 2010-01-12 |
| 7265364 | Level sensor for lithographic apparatus | Paulus Antonius Andreas Teunissen, Petra Albertina Margaretha Dekkers-Rog, Alexander Charles Franciscus Anna Van Well | 2007-09-04 |
| 7248337 | Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby | Paulus Antonius Andreas Teunissen, Petrus Johannes Maria Broodbakker | 2007-07-24 |
| 6987555 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Paulus Antonius Andreas Teunissen, Gerrit Johannes Nijmeijer, Frank Staals, Robert Jan Van Wijk, Roeland Nicolaas Maria Vanneer | 2006-01-17 |
| 6906785 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Paulus Antonius Andreas Teunissen | 2005-06-14 |