Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7751059 | Method for correcting disturbances in a level sensor light path | Nicolaas Antonius Allegondus Johannes Van Asten, Oana Cristina Balan, Luberthus Ouwehand, Machiel Jacobus Johannes Viguurs, Lun Kai Cheng +3 more | 2010-07-06 |
| 7411667 | Method for correcting disturbances in a level sensor light path | Nicolaas Antonius Allegondus Johannes Van Asten, Oana Cristina Balan, Luberthus Ouwehand, Machiel Jacobus Johannes Viguurs, Lun Kai Cheng +3 more | 2008-08-12 |
| 7265364 | Level sensor for lithographic apparatus | Paulus Antonius Andreas Teunissen, Rene Marinus Gerardus Johan Queens, Petra Albertina Margaretha Dekkers-Rog | 2007-09-04 |