Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7265364 | Level sensor for lithographic apparatus | Paulus Antonius Andreas Teunissen, Rene Marinus Gerardus Johan Queens, Alexander Charles Franciscus Anna Van Well | 2007-09-04 |
| 6955074 | Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Gerrit Johannes Nijmeijer | 2005-10-18 |