Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360403 | Bandwidth calculation system and method for determining a desired wavelength bandwidth for a measurement beam in a mark detection system | Jia Wang, Hua Li | 2022-06-14 |
| 8164740 | Illumination system coherence remover with two sets of stepped mirrors | Huibert Visser, Lev Ryzhikov, Scott Coston, Adel Joobeur, Rob Vink +1 more | 2012-04-24 |
| 8159651 | Illumination system coherence remover with a series of partially reflective surfaces | Huibert Visser, Lev Ryzhikov, Scott Coston, Adel Joobeur, Rob Vink +1 more | 2012-04-17 |
| 7781237 | Alignment marker and lithographic apparatus and device manufacturing method using the same | Gert-Jan Heerens, Anastasius Jacobus Anicetus Bruinsma, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Hubert Adriaan Van Mierlo, Willem Vliegenthart | 2010-08-24 |
| 7609362 | Scanning lithographic apparatus and device manufacturing method | Pieter Willem Herman De Jager, Cheng-Qun Gui, Eduard Hoeberichts | 2009-10-27 |
| 7480028 | Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program | Michael Van Der Veen, Anastasius Jacobus Anicetus Bruinsma, Henricus Wilhelmus Maria Van Buel, Martinus Hendrikus Antonius Leenders, Christianus Gerardus Maria De Mol +1 more | 2009-01-20 |
| 6955074 | Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Anastasius Jacobus Anicetus Bruinsma, Gerrit Johannes Nijmeijer, Petra Albertina Margaretha Dekkers-Rog | 2005-10-18 |