| 11971665 |
Wafer alignment using form birefringence of targets or product |
Joshua Adams, Yuxiang Lin, Krishanu SHOME, Igor Matheus Petronella Aarts |
2024-04-30 |
| 11156928 |
Alignment mark for two-dimensional alignment in an alignment system |
Junqiang Zhou, Piotr Jan Meyer, Jeffrey John Lombardo, Igor Matheus Petronella Aarts |
2021-10-26 |
| 11054751 |
Apparatus with a sensor and a method of performing target measurement |
Hong Ye |
2021-07-06 |
| 10345711 |
Substrate placement in immersion lithography |
Christiaan Alexander Hoogendam, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2019-07-09 |
| 9740106 |
Substrate placement in immersion lithography |
Christiaan Alexander Hoogendam, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2017-08-22 |
| 9551939 |
Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method |
Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Stanley Drazkiewicz, Justin Kreuzer |
2017-01-24 |
| 9506743 |
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method |
Arie Jeffrey Den Boef, Justin Kreuzer, Simon Gijsbert Josephus Mathijssen, J. Christian Swindal, Patricius Aloysius Jacobus Tinnemans +1 more |
2016-11-29 |
| 9182222 |
Substrate placement in immersion lithography |
Christiaan Alexander Hoogendam, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2015-11-10 |
| 8441617 |
Substrate placement in immersion lithography |
Christiaan Alexander Hoogendam, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2013-05-14 |
| 8077291 |
Substrate placement in immersion lithography |
Christiaan Alexander Hoogendam, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2011-12-13 |
| 7835017 |
Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby |
Theodorus Marinus Modderman, Nicolaas Antonius Allegondus Johannes Van Asten, Johan Maria Van Boxmeer |
2010-11-16 |
| 7352440 |
Substrate placement in immersion lithography |
Christiaan Alexander Hoogendam, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2008-04-01 |
| 7280228 |
System and method of measurement, system and method of alignment, lithographic apparatus and method |
Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Jeroen Thomas Broekhuijse, Sigurd Dressler, Edwin Eduard Nicolaas Josephus Krijnen +3 more |
2007-10-09 |
| 7206058 |
Off-axis levelling in lithographic projection apparatus |
Theodorus Marinus Modderman, Johannes Christiaan Maria Jasper |
2007-04-17 |
| 7202938 |
Off-axis levelling in lithographic projection apparatus |
Theodorus Marinus Modderman, Nicholaas A. A. J. van Asten, Frederik T. E. Heuts, Richard J. H. Du Croo de Jongh, Marcus Boonman +1 more |
2007-04-10 |
| 7116401 |
Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method |
Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Roeland Nicolaas Maria Vanneer |
2006-10-03 |
| 7019815 |
Off-axis leveling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Nicolaas Antonius Allegondus Johannes Van Asten, Frederik T. E. Heuts +5 more |
2006-03-28 |
| 6987555 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Paulus Antonius Andreas Teunissen, Rene Marinus Gerardus Johan Queens, Frank Staals, Robert Jan Van Wijk, Roeland Nicolaas Maria Vanneer |
2006-01-17 |
| 6955074 |
Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby |
Leon Martin Levasier, Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Petra Albertina Margaretha Dekkers-Rog |
2005-10-18 |
| 6924884 |
Off-axis leveling in lithographic projection apparatus |
Marcus Boonman, Petrus Johannes Maria Broodbakker, Mingcheng Zong, Jozef Cornelus Antonius Roijers |
2005-08-02 |
| 6882405 |
Off-axis levelling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Theodorus Marinus Modderman |
2005-04-19 |
| 6674510 |
Off-axis levelling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Nicolaas Antonius Allegondus Johannes Van Asten, Frederik T. E. Heuts +5 more |
2004-01-06 |