Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Justin Kreuzer, Gerrit Johannes Nijmeijer | 2017-01-24 |
| 7027129 | System for laser beam expansion without expanding spatial coherence | Alexander Kremer | 2006-04-11 |
| 6801299 | System for laser beam expansion without expanding spatial coherence | Alexander Kremer | 2004-10-05 |