Issued Patents All Time
Showing 1–25 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405535 | Method for filtering an image and associated metrology apparatus | Armand Eugene Albert Koolen, Nikhil Mehta, Patrick Warnaar, Vasco Tomas Tenner, Patricius Aloysius Jacobus Tinnemans +1 more | 2025-09-02 |
| 12405227 | Method for region of interest processing for reticle particle detection | Peter Kochersperger, Christopher Michael DOHAN, Michal Emanuel Pawlowski, Aage Bendiksen, Kirill Urievich SOBOLEV +3 more | 2025-09-02 |
| 12399000 | Systems and methods for measuring intensity in a lithographic alignment apparatus | Mohamed Swillam, Stephen Roux, Michael L. Nelson, Muhsin Eralp | 2025-08-26 |
| 12379655 | Contaminant identification metrology system, lithographic apparatus, and methods thereof | Andrew Judge, Ravi Chaitanya Kalluri, Michal Emanuel Pawlowski, James H. Walsh | 2025-08-05 |
| 12298257 | Monolithic particle inspection device | Ilse VAN WEPEREN, Arjan Johannes Anton Beukman, Mohamed Swillam, Stephen Roux | 2025-05-13 |
| 12216414 | Self-referencing integrated alignment sensor | Mohamed Swillam, Stephen Roux | 2025-02-04 |
| 12135505 | Spectrometric metrology systems based on multimode interference and lithographic apparatus | Mohamed Swillam, Stephen Roux | 2024-11-05 |
| 12124177 | Overlay measurement system using lock-in amplifier technique | Mohamed Swillam, Simon Reinald HUISMAN | 2024-10-22 |
| 11994808 | Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof | Mohamed Swillam, Tamer Elazhary, Stephen Roux, Yuxiang Lin | 2024-05-28 |
| 11841628 | Apparatus for and method of sensing alignment marks | Krishanu SHOME | 2023-12-12 |
| 11662198 | Optical arrangement for an inspection apparatus | Parag Vinayak Kelkar | 2023-05-30 |
| 11531280 | Compact alignment sensor arrangements | Tamer Elazhary, Franciscus Godefridus Casper Bijnen, Krishanu SHOME | 2022-12-20 |
| 11526091 | Sensor apparatus and method for lithographic measurements | Tamer Elazhary, Yuxiang Lin, Kirill Urievich SOBOLEV | 2022-12-13 |
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN +4 more | 2021-11-16 |
| 10908516 | Metrology tool and method of using the same | — | 2021-02-02 |
| 10732524 | Optical system of an alignment system | Krishanu SHOME | 2020-08-04 |
| 10558131 | Polarization independent metrology system | Krishanu SHOME | 2020-02-11 |
| 10488767 | Alignment system wafer stack beam analyzer | Krishanu SHOME, Igor Matheus Petronella Aarts, Irit Tzemah | 2019-11-26 |
| 10338481 | Polarization independent metrology system | Krishanu SHOME | 2019-07-02 |
| 9970747 | Position measurement with illumination profile having two diametrically opposed off-axis radiation | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2018-05-15 |
| 9927726 | Polarization independent interferometer | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2018-03-27 |
| 9857703 | Alignment sensor and lithographic apparatus | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans | 2018-01-02 |
| 9605947 | Position measurement with illumination profile having regions confined to peripheral portion of pupil | Arie Jeffrey Den Boef, Simon Josephus Mathijssen | 2017-03-28 |
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Stanley Drazkiewicz, Gerrit Johannes Nijmeijer | 2017-01-24 |
| 9506743 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Gerrit Johannes Nijmeijer, J. Christian Swindal, Patricius Aloysius Jacobus Tinnemans +1 more | 2016-11-29 |