Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140872 | Optical designs of miniaturized overlay measurement system | Mohamed Swillam, Stephen Roux, Yevgeniy Konstantinovich Shmarev | 2024-11-12 |
| 12135909 | Synchronization of disparity camera | Turhan Karadeniz, Dong-Qing Zhang, John Jacob Nelson, Yujia Huang, Cameron M. Lee | 2024-11-05 |
| 12066762 | On chip sensor for wafer overlay measurement | Mohamed Swillam, Stephen Roux, Arie Jeffrey Den Boef | 2024-08-20 |
| 12013531 | Active disparity sensing of head mounted display | Karol Constantine Hatzilias, Yu Shi, Guohua Wei, Michiel Koen Callens, Nicholas McGee | 2024-06-18 |
| 11994808 | Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof | Mohamed Swillam, Stephen Roux, Yuxiang Lin, Justin Kreuzer | 2024-05-28 |
| 11789368 | Lithographic apparatus, metrology system, and illumination systems with structured illumination | Yuxiang Lin, Joshua Adams, Krishanu SHOME | 2023-10-17 |
| 11675192 | Hybrid coupling diffractive optical element | Michael Patrick Schaub, Byron B. Taylor | 2023-06-13 |
| 11604351 | Field bias optical element for digital projector | Yang Zhao, Nicholas Daniel Trail, Byron Taylor | 2023-03-14 |
| 11531280 | Compact alignment sensor arrangements | Justin Kreuzer, Franciscus Godefridus Casper Bijnen, Krishanu SHOME | 2022-12-20 |
| 11526091 | Sensor apparatus and method for lithographic measurements | Justin Kreuzer, Yuxiang Lin, Kirill Urievich SOBOLEV | 2022-12-13 |
| 11525662 | Electromechanical displacement sensor | Yuri Toride | 2022-12-13 |
| 11202043 | Self-testing display device | Nicholas Daniel Trail, Brian Wheelwright, Weichuan Gao, Jacques Gollier, Barry D. Silverstein | 2021-12-14 |
| 11181835 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Johannes Antonius Gerardus Akkermans, Simon Reinald HUISMAN | 2021-11-23 |
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN, Justin Kreuzer +4 more | 2021-11-16 |