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Wafer alignment using form birefringence of targets or product |
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| 11899380 |
Apparatus for and method of sensing alignment marks |
Igor Matheus Petronella Aarts, Junwon Lee |
2024-02-13 |
| 11841628 |
Apparatus for and method of sensing alignment marks |
Justin Kreuzer |
2023-12-12 |
| 11789368 |
Lithographic apparatus, metrology system, and illumination systems with structured illumination |
Yuxiang Lin, Joshua Adams, Tamer Elazhary |
2023-10-17 |
| 11703771 |
Variable diffraction grating |
Ali ALSAQQA, Fadi El-Ghussein, Lambertus Gerardus Maria Kessels, Roxana Rezvani Naraghi, Timothy A. Brunner +1 more |
2023-07-18 |
| 11531280 |
Compact alignment sensor arrangements |
Tamer Elazhary, Justin Kreuzer, Franciscus Godefridus Casper Bijnen |
2022-12-20 |
| 11513446 |
Adaptive alignment |
Greger Andersson, Zahrasadat Dastouri, Igor Matheus Petronella Aarts |
2022-11-29 |
| 11493852 |
Noise correction for alignment signal |
Zahrasadat Dastouri, Greger Andersson, Igor Matheus Petronella Aarts |
2022-11-08 |
| 11347152 |
Scan signal characterization diagnostics |
Cornelis Melchior BROUWER |
2022-05-31 |
| 11175593 |
Alignment sensor apparatus for process sensitivity compensation |
Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN +4 more |
2021-11-16 |
| 11016396 |
Method, substrate and apparatus to measure performance of optical metrology |
Leonardo Gabriel Montilla |
2021-05-25 |
| 10732524 |
Optical system of an alignment system |
Justin Kreuzer |
2020-08-04 |
| 10558131 |
Polarization independent metrology system |
Justin Kreuzer |
2020-02-11 |
| 10488767 |
Alignment system wafer stack beam analyzer |
Igor Matheus Petronella Aarts, Justin Kreuzer, Irit Tzemah |
2019-11-26 |
| 10338481 |
Polarization independent metrology system |
Justin Kreuzer |
2019-07-02 |