Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN +4 more | 2021-11-16 |
| 10895813 | Lithographic cluster, lithographic apparatus, and device manufacturing method | Eric Brian Catey, John D. Connelly | 2021-01-19 |
| 10488767 | Alignment system wafer stack beam analyzer | Krishanu SHOME, Igor Matheus Petronella Aarts, Justin Kreuzer | 2019-11-26 |