Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Sebastianus Adrianus GOORDEN, Justin Kreuzer +4 more | 2021-11-16 |