Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339588 | High force low voltage piezoelectric micromirror actuator | Luc Haspeslagh, Nitesh Pandey, Ties Wouter VAN DER WOORD, Halil Gökay YEGEN, Guilherme Brondani Torri +3 more | 2025-06-24 |
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Nitish Kumar, Jin LIAN +1 more | 2025-06-10 |
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Stephen Roux, Sergei Sokolov, Filippo ALPEGGIANI | 2025-04-29 |
| 12287470 | Dark field microscope | — | 2025-04-29 |
| 12282263 | Metrology system and lithographic system | Simon Reinald HUISMAN | 2025-04-22 |
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Olger Victor Zwier, Maurits Van Der Schaar, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif +6 more | 2025-04-15 |
| 12276784 | Micromirror arrays | Luc Haspeslagh, Veronique Rochus, Guilherme Brondani Torri, Nitesh Pandey | 2025-04-15 |
| 12259546 | Micromirror arrays | Alexandre Halbach, Nitesh Pandey, Veronique Rochus, Luc Haspeslagh, Guilherme Brondani Torri | 2025-03-25 |
| 12189314 | Metrology method and associated metrology and lithographic apparatuses | Simon Gijsbert Josephus Mathijssen, Leendert Jan KARSSEMEIJER, Manouk RIJPSTRA, Ralph Brinkhof, Kaustuve Bhattacharyya | 2025-01-07 |
| 12025925 | Metrology method and lithographic apparatuses | Filippo ALPEGGIANI, Henricus Petrus Maria Pellemans, Simon Reinald HUISMAN | 2024-07-02 |
| 11940608 | Dark field microscope | — | 2024-03-26 |
| 11927891 | Apparatus and methods for determining the position of a target structure on a substrate | Nitesh Pandey, Duygu Akbulut, Alessandro Polo | 2024-03-12 |
| 11906906 | Metrology method and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman | 2024-02-20 |
| 11762305 | Alignment method | Sergei Sokolov, Filippo ALPEGGIANI, Simon Reinald HUISMAN | 2023-09-19 |
| 11650513 | Apparatus and method for measuring a position of a mark | — | 2023-05-16 |
| 11474435 | Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter | Simon Reinald HUISMAN, Sergei Sokolov | 2022-10-18 |
| 11409206 | Alignment method and apparatus | Simon Reinald HUISMAN | 2022-08-09 |
| 11360399 | Metrology sensor for position metrology | Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen, Henricus Petrus Maria Pellemans | 2022-06-14 |
| 11333985 | Position sensor | Simon Reinald HUISMAN, Duygu Akbulut, Alessandro Polo, Johannes Antonius Gerardus Akkermans, Arie Jeffrey Den Boef | 2022-05-17 |
| 11181835 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Johannes Antonius Gerardus Akkermans, Simon Reinald HUISMAN, Tamer Elazhary | 2021-11-23 |
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Justin Kreuzer +4 more | 2021-11-16 |
| 11086240 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Nitesh Pandey, Duygu Akbulut, Alessandro Polo, Simon Reinaid Huisman | 2021-08-10 |
| 11042096 | Alignment measurement system | Stefan Michiel Witte, Alessandro Antoncecchi, Hao Zhang, Stephen EDWARD, Paulus Clemens Maria PLANKEN +3 more | 2021-06-22 |
| 11022902 | Sensor, lithographic apparatus, and device manufacturing method | Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, Haico Victor Kok, William Peter Van Drent | 2021-06-01 |
| 10942461 | Alignment measurement system | Simon Reinald HUISMAN, Irwan Dani Setija | 2021-03-09 |