Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032299 | Metrology method and associated metrology and lithographic apparatuses | Patricius Aloysius Jacobus Tinnemans, Igor Matheus Petronella Aarts, Kaustuve Bhattacharyya, Ralph Brinkhof, Leendert Jan KARSSEMEIJER +4 more | 2024-07-09 |
| 11022902 | Sensor, lithographic apparatus, and device manufacturing method | Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, William Peter Van Drent, Sebastianus Adrianus GOORDEN | 2021-06-01 |
| 10481507 | Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus | Kevin J. Violette, Igor Matheus Petronella Aarts, Eric Brian Catey | 2019-11-19 |
| 9971254 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more | 2018-05-15 |
| 9891532 | Lithographic method to apply a pattern to a substrate and lithographic apparatus | — | 2018-02-13 |
| 9864282 | Sensor system for lithography | Robbert Jan Voogd | 2018-01-09 |
| 9753382 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more | 2017-09-05 |
| 9690207 | Sensor system for lithography | Robbert Jan Voogd | 2017-06-27 |
| 9423688 | Lithographic method to apply a pattern to a substrate and lithographic apparatus | — | 2016-08-23 |
| 9331117 | Sensor and lithographic apparatus | Stoyan Nihtianov, Martijn Gerard Dominique Wehrens | 2016-05-03 |
| 9170498 | Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor | Marcus Adrianus Van De Kerkhof, Wilhelmus Petrus De Boeij, Hendrikus Robertus Marie Van Greevenbroek, Michel François Hubert Klaassen, Martijn Gerard Dominique Wehrens +2 more | 2015-10-27 |
| 9116446 | Lithographic apparatus and method | Robbert Jan Voogd, Bearrach Moest, Petrus Franciscus Van Gils | 2015-08-25 |
| 8760620 | Lithographic method to apply a pattern to a substrate and lithographic apparatus | — | 2014-06-24 |
| 8629418 | Lithographic apparatus and sensor therefor | Marcus Adrianus Van De Kerkhof, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more | 2014-01-14 |
| 8482718 | Lithographic apparatus and device manufacturing method | Wilhelmus Maria Corbeij, Marcus Adrianus Van De Kerkhof | 2013-07-09 |
| 8436977 | Lithographic method to apply a pattern to a substrate and lithographic apparatus | — | 2013-05-07 |
| 8049864 | Device manufacturing method and lithographic apparatus | Johannes Jacobus Matheus Baselmans, Marcus Adrianus Van De Kerkhof | 2011-11-01 |
| 8013977 | Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor | Arie Johan Van Der Sijs | 2011-09-06 |
| 7773235 | Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus | Koen Kivits, Ron Van De Laak, Johannes Maria Kuiper, Gerbrand Van Der Zouw, Hoite Pieter Theodoor Tolsma | 2010-08-10 |
| 7453078 | Sensor for use in a lithographic apparatus | Marcus Adrianus Van De Kerhof, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more | 2008-11-18 |
| 7443485 | Apodization measurement for lithographic apparatus | Marcus Adrianus Van De Kerkhof | 2008-10-28 |
| 7409302 | Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus | Koen Kivits, Ron Van De Laak, Johannes Maria Kuiper, Gerbrand Van Der Zouw, Hoite Pieter Theodoor Tolsma | 2008-08-05 |
| 7388652 | Wave front sensor with grey filter and lithographic apparatus comprising same | Arie Johan Van Der Sijs | 2008-06-17 |
| 7315353 | Apodization measurement for lithographic apparatus | Marcus Adrianus Van De Kerkhof | 2008-01-01 |
| 7308368 | Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program | Koen Kivits, Ron Van De Laak, Hans Kuiper | 2007-12-11 |