Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8426831 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2013-04-23 |
| 8138485 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2012-03-20 |
| 8013977 | Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor | Haico Victor Kok | 2011-09-06 |
| 7586108 | Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2009-09-08 |
| 7388652 | Wave front sensor with grey filter and lithographic apparatus comprising same | Haico Victor Kok | 2008-06-17 |