| 12342635 |
Semiconductor detector and method of fabricating same |
Gianpaolo LORITO, Xinqing LIANG, Kenichi Kanai |
2025-06-24 |
| 11843069 |
Semiconductor detector and method of fabricating same |
Gianpaolo LORITO, Xinqing LIANG, Kenichi Kanai |
2023-12-12 |
| 11378893 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2022-07-05 |
| 10838310 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2020-11-17 |
| 10678147 |
Measurement systems, lithographic apparatus, device manufacturing method and a method of measuring |
— |
2020-06-09 |
| 10508896 |
Measurement substrate and a measurement method |
Ruud Hendrikus Martinus Johannes Bloks, Johannes Paul Marie De La Rosette, Thibault Simon Mathieu Laurent, Kofi Afolabi Anthony Makinwa, Patricius Jacobus Neefs +1 more |
2019-12-17 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2019-04-09 |
| 9331117 |
Sensor and lithographic apparatus |
Haico Victor Kok, Martijn Gerard Dominique Wehrens |
2016-05-03 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 8426831 |
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector |
Arie Johan Van Der Sijs, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more |
2013-04-23 |
| 8138485 |
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector |
Arie Johan Van Der Sijs, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more |
2012-03-20 |
| 7830495 |
Lithographic apparatus and position sensor |
Olaf Hubertus Wilhelmus Van Bruggen, Marcel Koenraad Marie Baggen, Johannes Roland Dassel, Remko Wakker, Frank Auer +4 more |
2010-11-09 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7586108 |
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
Arie Johan Van Der Sijs, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more |
2009-09-08 |
| 7321416 |
Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion |
Martinus Cornelis Reijnen, Andrej Makarovic, Lambertus Gerardus Maria Kessels, Petrus Wilhelmus Josephus Maria Kemper, Kamen Hristov Chilov |
2008-01-22 |
| 7304715 |
Lithographic apparatus and device manufacturing method |
Theodorus Petrus Maria Cadee, Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Koen Goorman +6 more |
2007-12-04 |
| 7190437 |
Wireless signaling in a lithographic apparatus |
Hans Butler, Petrus Wilhelmus Josephus Maria Kemper |
2007-03-13 |
| 7170583 |
Lithographic apparatus immersion damage control |
Frits Van Der Meulen, Henrikus Herman Marie Cox, Martijn Houkes, Robertus Johannes Van Vliet, Petrus Wilhelmus Josephus Maria Kemper +1 more |
2007-01-30 |
| 7148494 |
Level sensor, lithographic apparatus and device manufacturing method |
Anastasius Jacobus Anicetus Bruinsma, Frank Staals, Robert Jan Van Wijk |
2006-12-12 |