Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9019476 | Lithographic apparatus and device manufacturing method | Rene Theodorus Petrus Compen, Oleg Viacheslavovich Voznyi, Martijn Houben, Majid El Bouchaibi, Franciscus Johannes Maria Boekholt | 2015-04-28 |
| 7978308 | Lithographic apparatus and device manufacturing method | Rene Theodorus Petrus Compen, Oleg Viacheslavovich Voznyi, Martijn Houben, Majid El Bouchaibi, Franciscus Johannes Maria Boekholt | 2011-07-12 |
| 7830495 | Lithographic apparatus and position sensor | Olaf Hubertus Wilhelmus Van Bruggen, Marcel Koenraad Marie Baggen, Johannes Roland Dassel, Stoyan Nihtianov, Frank Auer +4 more | 2010-11-09 |
| 7808612 | Lithographic apparatus and method for masking a substrate | Erik Marie Jose Smeets | 2010-10-05 |
| 7777863 | Lithographic apparatus with mask to prevent exposure of peripheral exposure region of substrate | Erik Marie Jose Smeets | 2010-08-17 |