Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329497 | Substrate table, lithographic apparatus and device manufacturing method | Bensely Albert | 2016-05-03 |
| 9019476 | Lithographic apparatus and device manufacturing method | Oleg Viacheslavovich Voznyi, Martijn Houben, Majid El Bouchaibi, Franciscus Johannes Maria Boekholt, Remko Wakker | 2015-04-28 |
| 9013682 | Clamping device and object loading method | Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens, Martin Frans Pierre Smeets | 2015-04-21 |
| 8902399 | Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus | Joost Jeroen Ottens | 2014-12-02 |
| 8810777 | Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system | Theodorus Petrus Maria Cadee, Noud Jan Gilissen, James Kennon | 2014-08-19 |
| 8792085 | Lithographic apparatus, substrate table, and method for enhancing substrate release properties | Michiel Puyt, Arno Jan Bleeker, Rudolf Hartmut Fischer | 2014-07-29 |
| 8384882 | Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate | Gerardus Petrus Matthijs Van Nunen, Martijn Houben, Marco Adrianus Peter Van Den Heuvel | 2013-02-26 |
| 8269949 | Lithographic apparatus and device manufacturing method | Marcus Martinus Petrus Adrianus Vermeulen, Andre Bernardus Jeunink, Erik Roelof Loopstra, Joost Jeroen Ottens, Peter Smits +4 more | 2012-09-18 |
| 8154709 | Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Marco Adrianus Peter Van Den Heuvel | 2012-04-10 |
| 8149387 | Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Abraham Alexander Soethoudt | 2012-04-03 |
| 8086348 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit | 2011-12-27 |
| 8064045 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit | 2011-11-22 |
| 7978308 | Lithographic apparatus and device manufacturing method | Oleg Viacheslavovich Voznyi, Martijn Houben, Majid El Bouchaibi, Franciscus Johannes Maria Boekholt, Remko Wakker | 2011-07-12 |
| 7791708 | Lithographic apparatus, substrate table, and method for enhancing substrate release properties | Michiel Puyt, Arno Jan Bleeker, Johannes Hendrikus Gertrudis Franssen, Johannes Theodorus Guillielmus Maria Van De Ven, Egbert Dirk Stam +2 more | 2010-09-07 |
| 7639345 | Lithographic apparatus | Joost Jeroen Ottens, Aschwin Lodewijk Hendricus Johannes Van Meer, Wim Tjibbo Tel, Jacob Willem Vink, Petrus Johannes Gerrits | 2009-12-29 |
| 7385670 | Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus | Joost Jeroen Ottens | 2008-06-10 |
| 7050147 | Method of adjusting a height of protrusions on a support surface of a support table, a lithographic projection apparatus, and a support table for supporting an article in a lithographic apparatus | — | 2006-05-23 |