Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7791708 | Lithographic apparatus, substrate table, and method for enhancing substrate release properties | Michiel Puyt, Arno Jan Bleeker, Johannes Hendrikus Gertrudis Franssen, Rene Theodorus Petrus Compen, Johannes Theodorus Guillielmus Maria Van De Ven +2 more | 2010-09-07 |