Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7878755 | Load lock and method for transferring objects | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey | 2011-02-01 |
| 7791708 | Lithographic apparatus, substrate table, and method for enhancing substrate release properties | Michiel Puyt, Arno Jan Bleeker, Rene Theodorus Petrus Compen, Johannes Theodorus Guillielmus Maria Van De Ven, Egbert Dirk Stam +2 more | 2010-09-07 |
| 7576831 | Method and apparatus for maintaining a machine part | Pieter Johannes Marius Van Groos, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey, Albert Jan Hendrik Klomp +2 more | 2009-08-18 |
| 7508494 | Lithographic apparatus and a subtrate table for exciting a shockwave in a substrate | Arno Jan Bleeker, Dominicus Jacobus Petrus Adrianus Franken, Johannes Theodorus Guillielmus Maria Van De Ven, Michiel Puyt, Teun Peterus Adrianus De Wilt | 2009-03-24 |
| 7394520 | Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Raimond Visser, Josephus Cornelius Johannes Antonius Vugts, Henricus Johannes Louis Marie Vullings +1 more | 2008-07-01 |
| 7384228 | Insertion device, lithographic apparatus with said insertion device and device manufacturing method | Leo Wilhelmus Maria Kuipers | 2008-06-10 |
| 7359031 | Lithographic projection assembly, load lock and method for transferring objects | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey | 2008-04-15 |
| 7349082 | Particle detection device, lithographic apparatus and device manufacturing method | Johannes Onvlee, Peter Greve | 2008-03-25 |
| 7283225 | Particle detection device, lithographic apparatus and device manufacturing method | Johannes Onvlee, Raimond Visser, Peter Greve, Erwin Theodorus Jacoba Verhagen | 2007-10-16 |
| 5217819 | Method of manufacturing a thin-film magnetic head and magnetic head | James R. Peterson, Johannes F. De Proost, Gerardus H. J. Somers, Franciscus A. Pronk, Victor Zieren +2 more | 1993-06-08 |