Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9289802 | Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Jacques Cor Johan Van Der Donck, Teunis Cornelis van den Dool, Gerrit Oosterhuis | 2016-03-22 |
| 8976332 | Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system | Martinus Wilhelmus Van Den Heuvel, Johannes Christiaan Leonardus Franken | 2015-03-10 |
| 7878755 | Load lock and method for transferring objects | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen | 2011-02-01 |
| 7576831 | Method and apparatus for maintaining a machine part | Pieter Johannes Marius Van Groos, Jan Frederik Hoogkamp, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen, Albert Jan Hendrik Klomp +2 more | 2009-08-18 |
| 7394520 | Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Raimond Visser, Henricus Johannes Louis Marie Vullings, Leo Wilhelmus Maria Kuipers +1 more | 2008-07-01 |
| 7359031 | Lithographic projection assembly, load lock and method for transferring objects | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen | 2008-04-15 |