Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9213246 | Fluid extraction system, lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Paul Petrus Joannes Berkvens +3 more | 2015-12-15 |
| 8976332 | Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system | Johannes Christiaan Leonardus Franken, Josephus Cornelius Johannes Antonius Vugts | 2015-03-10 |
| 8654309 | Fluid extraction system, lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Paul Petrus Joannes Berkvens +3 more | 2014-02-18 |
| 7843548 | Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system | Johannes Christiaan Leonardus Franken, Josephus Cornelis Johannes Antonlus Vugts | 2010-11-30 |