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Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2019-04-23 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2017-05-09 |
| 9213246 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Martinus Wilhelmus Van Den Heuvel +3 more |
2015-12-15 |
| 8786830 |
Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method |
Christophe De Metsenaere, Ronald Casper Kunst, Mauritius Gerardus Elisabeth Schneiders, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran |
2014-07-22 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-03-25 |
| 8654309 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Martinus Wilhelmus Van Den Heuvel +3 more |
2014-02-18 |
| 8638417 |
Fluid handling structure, lithographic apparatus and a device manufacturing method |
Danny Maria Hubertus Philips, Daniel Jozef Maria Direcks, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Marcus Johannes Van Der Zanden +1 more |
2014-01-28 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-01-21 |
| 8587762 |
Methods relating to immersion lithography and an immersion lithographic apparatus |
Bob Streefkerk, Roelof Frederik De Graaf, Johannes Catharinus Hubertus Mulkens, Marcel Beckers, David Lucien Anstotz |
2013-11-19 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2013-06-25 |
| 8421993 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Koen Steffens +1 more |
2013-04-16 |
| 8405815 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Danny Maria Hubertus Philips, Daniel Jozef Maria Direcks, Maikel Adrianus Cornelis Schepers |
2013-03-26 |
| 7710540 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Henrikus Herman Marie Cox, Jeroen Johannes Sophia Maria Mertens, Wilhelmus Franciscus Johannes Simons |
2010-05-04 |