Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339592 | Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process | Victor Sebastiaan Dolk, Koos Van Berkel | 2025-06-24 |
| 12276918 | Method and apparatus for calculating a spatial map associated with a component | Koos Van Berkel, Wenjie JIN | 2025-04-15 |
| 8786830 | Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method | Christophe De Metsenaere, Ronald Casper Kunst, Paul Petrus Joannes Berkvens, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran | 2014-07-22 |
| 7948609 | Lithographic apparatus, stage system and stage control method | Wilhelmus Franciscus Johannes Simons | 2011-05-24 |