| 8885147 |
Lithographic apparatus and device manufacturing method |
Michael Johannes Vervoordeldonk, Youssef Karel Maria De Vos, Johannes Hubertus Antonius Van De Rijdt, Robertus Jacobus Theodorus Van Kempen |
2014-11-11 |
| 8830442 |
Servo control system, lithographic apparatus and control method |
Youssef Karel Maria De Vos, Dirk-Jan Bijvoet, Ramidin Izair Kamidi, Khalid Manssouri |
2014-09-09 |
| 8786830 |
Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method |
Christophe De Metsenaere, Paul Petrus Joannes Berkvens, Mauritius Gerardus Elisabeth Schneiders, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran |
2014-07-22 |
| 8279407 |
Stage system and lithographic apparatus comprising such stage system |
Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Marcel François Heertjes +1 more |
2012-10-02 |
| 7782446 |
Stage system and lithographic apparatus comprising such stage system |
Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Youssef Karel Maria De Vos |
2010-08-24 |
| 7742149 |
Stage system and lithographic apparatus comprising such a stage system |
Youssef Karel Maria De Vos, Patricia Vreugdewater, Peter Paul HEMPENIUS |
2010-06-22 |
| 7657334 |
Lithographic apparatus and control method |
Youssef Karel Maria De Vos, Yin Tim Tso, Ramidin Izair Kamidi |
2010-02-02 |
| 7379156 |
Lithographic apparatus and device manufacturing method |
Yin Tim Tso, Youssef Karel Maria De Vos, Ramidln Izair Kamidi |
2008-05-27 |
| 7256866 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Hans Butler, Harmen Klaas Van Der Schoot, Youssef Karel Maria De Vos |
2007-08-14 |