Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454938 | Control system, method to increase a bandwidth of a control system, and lithographic apparatus | Daniel Andreas Deenen, Natalia Irigoyen Perdiguero, Yannick Knops | 2022-09-27 |
| 10175587 | Lithographic apparatus and device manufacturing method | Hans Butler, Marcus Joseph Elisabeth Godfried Breukers | 2019-01-08 |
| 8891063 | Lithographic apparatus and device manufacturing method | Marcus Joseph Elisabeth Godfried Breukers, Niels Johannes Maria Bosch | 2014-11-18 |
| 8825182 | Position control system, lithographic apparatus, and method to control a position of a movable object | Wilhelmus Franciscus Johannes Simons, Norbertus Josephus Martinus Van Den Nieuwelaar, Joost Jozef Hendrik Gielis, Ferdinand Hendriks | 2014-09-02 |
| 8675179 | Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable object | Daan Willem Theresia Hennekens | 2014-03-18 |
| 8452442 | Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens | 2013-05-28 |
| 8373849 | Lithographic apparatus and control system | — | 2013-02-12 |
| 8279407 | Stage system and lithographic apparatus comprising such stage system | Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Emiel Jozef Melanie Eussen, Ronald Casper Kunst, Engelbertus Antonius Fransiscus Van Der Pasch +1 more | 2012-10-02 |
| 8135488 | Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens | 2012-03-13 |
| 8014881 | Lithographic apparatus and device manufacturing method | Mark Constant Johannes Baggen, Petrus Marinus Christianus Maria Van Den Biggelaar, Yin Tim Tso, Ramidin Izair Kamidi, Dennis Andreas Petrus Hubertina Houben +2 more | 2011-09-06 |
| 7817243 | Vibration isolation system | Jan-Gerard Cornelis Van Der Toorn | 2010-10-19 |
| 7818073 | Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method | — | 2010-10-19 |
| 7774287 | System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method | Yin Tim Tso, Edwin Teunis Van Donkelaar | 2010-08-10 |
| 7453228 | Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Yin Tim Tso, Ramidin Izair Kamidi, Dennis Andreas Petrus Hubertina Houben | 2008-11-18 |