Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8014881 | Lithographic apparatus and device manufacturing method | Mark Constant Johannes Baggen, Yin Tim Tso, Marcel François Heertjes, Ramidin Izair Kamidi, Dennis Andreas Petrus Hubertina Houben +2 more | 2011-09-06 |
| 7679719 | Lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method | — | 2010-03-16 |
| 7446854 | Lithographic apparatus and device manufacturing method | — | 2008-11-04 |
| 7294844 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2007-11-13 |
| 7295283 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Frits Van Der Meulen, Franciscus Andreas Cornelis Johannes Spanjers, Jan-Gerard Cornelis Van Der Toorn, Arend-Jan Migchelbrink | 2007-11-13 |
| 7289858 | Lithographic motion control system and method | Edwin Teunis Van Donkelaar | 2007-10-30 |
| 7224428 | Lithographic apparatus and device manufacturing method | Robertus Johannes Marinus De Jongh, Thomas Augustus Mattaar, Jan Van De Ven | 2007-05-29 |
| 7113256 | Lithographic apparatus and device manufacturing method with feed-forward focus control | Hans Butler, Marcus Boonman | 2006-09-26 |
| 7016019 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Yin Tim Tso, Sjoerd Nicolaas Lambertus Donders, Theodorus Knoops | 2006-03-21 |