Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8452442 | Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Jeffrey Hendrikus Peter Maria Goossens | 2013-05-28 |
| 8135488 | Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Jeffrey Hendrikus Peter Maria Goossens | 2012-03-13 |
| 8014881 | Lithographic apparatus and device manufacturing method | Mark Constant Johannes Baggen, Petrus Marinus Christianus Maria Van Den Biggelaar, Yin Tim Tso, Marcel François Heertjes, Ramidin Izair Kamidi +2 more | 2011-09-06 |
| 7453228 | Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Marcel François Heertjes, Yin Tim Tso, Ramidin Izair Kamidi | 2008-11-18 |