Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8452442 | Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben | 2013-05-28 |
| 8135488 | Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben | 2012-03-13 |