| 10962890 |
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method |
Dave Braaksma, Hans Butler, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS, Stephan Christiaan Quintus Libourel +2 more |
2021-03-30 |
| 10481502 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2019-11-19 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Daniel Jozef Maria Direcks +11 more |
2019-04-23 |
| 10248027 |
Projection system |
Hans Butler, Raoul Maarten Simon Knops, Bob Streefkerk, Christiaan Louis Valentin, Jan Bernard Plechelmus Van Schoot +4 more |
2019-04-02 |
| 10222707 |
Lithographic apparatus and a device manufacturing method |
Theodorus Wilhelmus Polet, Henrikus Herman Marie Cox, Ronald Van Der Ham, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2019-03-05 |
| 9927721 |
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method |
Hans Butler, Wilhelmus Henricus Theodorus Maria Aangenent, Nic Jasper Dirkx, Ramidin Izair Kamidi |
2018-03-27 |
| 9915877 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2018-03-13 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2017-10-10 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Daniel Jozef Maria Direcks +11 more |
2017-05-09 |
| 9274436 |
Lithographic apparatus and a device manufacturing method |
Theodorus Wilhelmus Polet, Henrikus Herman Marie Cox, Ronald Van Der Ham, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2016-03-01 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens +7 more |
2014-12-16 |
| 8825182 |
Position control system, lithographic apparatus, and method to control a position of a movable object |
Norbertus Josephus Martinus Van Den Nieuwelaar, Marcel François Heertjes, Joost Jozef Hendrik Gielis, Ferdinand Hendriks |
2014-09-02 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Daniel Jozef Maria Direcks +10 more |
2014-03-25 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Daniel Jozef Maria Direcks +10 more |
2014-01-21 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Daniel Jozef Maria Direcks +11 more |
2013-06-25 |
| 8452442 |
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device |
Marcel François Heertjes, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens |
2013-05-28 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Nicolaas Rudolf Kemper, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Danny Maria Hubertus Philips +5 more |
2012-09-04 |
| 8135488 |
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device |
Marcel François Heertjes, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens |
2012-03-13 |
| 7948609 |
Lithographic apparatus, stage system and stage control method |
Mauritius Gerardus Elisabeth Schneiders |
2011-05-24 |
| 7710540 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Henrikus Herman Marie Cox, Jeroen Johannes Sophia Maria Mertens, Paul Petrus Joannes Berkvens |
2010-05-04 |
| 7630059 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Jan-Gerard Cornelis Van Der Toorn, Martijn Houkes |
2009-12-08 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Paulus Martinus Maria Liebregts, Menno Fien, Erik Roelof Loopstra, Ronald Van Der Ham, Daniel Jozef Maria Direcks +3 more |
2009-07-14 |
| 7205741 |
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sven Antoin Johan Hol |
2007-04-17 |
| 5273462 |
Connector keying system |
Max Huser, Stefan Schneeberger, Gunter Feldmeier |
1993-12-28 |