Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8825182 | Position control system, lithographic apparatus, and method to control a position of a movable object | Wilhelmus Franciscus Johannes Simons, Norbertus Josephus Martinus Van Den Nieuwelaar, Marcel François Heertjes, Ferdinand Hendriks | 2014-09-02 |