Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405542 | Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus | Istvan Nagy, Özer Duman, Arjan Gijsbertsen, Pieter Jacob Heres, Rudolf Michiel Hermans +3 more | 2025-09-02 |
| 11644755 | Lithographic method | Bearrach Moest, Rowin MEIJERINK, Thijs Schenkelaars, Laurentius Johannes Adrianus Van Bokhoven | 2023-05-09 |
| 10627721 | Lithography apparatus, and a method of manufacturing a device | Victor Manuel Blanco Carballo, Thomas Augustus Mattaar, Johannes Cornelis Paulus Melman, Gerben Pieterse, Johannes Theodorus Guillielmus Maria Van De Ven +2 more | 2020-04-21 |
| 10534270 | Lithography apparatus, a method of manufacturing a device and a control program | Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips, Frederik Antonius VAN DER ZANDEN +7 more | 2020-01-14 |
| 10261422 | Lithography apparatus and method of manufacturing a device | Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips, Frederik Antonius VAN DER ZANDEN +7 more | 2019-04-16 |
| 9964865 | Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus | Cédric Désiré Grouwstra, Nicolaas Rudolf Kemper, Dirk De Vries, Hua Li, Marinus Jochemsen | 2018-05-08 |
| 9606457 | Lithographic apparatus and device manufacturing method | Petrus Franciscus Van Gils, Arthur Erland Swaving | 2017-03-28 |
| 9329491 | Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus | Cédric Désiré Grouwstra, Nicolaas Rudolf Kemper, Dirk De Vries, Hua Li, Marinus Jochemsen | 2016-05-03 |
| 8825182 | Position control system, lithographic apparatus, and method to control a position of a movable object | Wilhelmus Franciscus Johannes Simons, Marcel François Heertjes, Joost Jozef Hendrik Gielis, Ferdinand Hendriks | 2014-09-02 |
| 7817241 | Lithographic apparatus and device manufacturing method | Suzan Leonie Auer-Jongepier, Johannes Onvlee | 2010-10-19 |
| 7756597 | Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program | Willem Herman Gertruda Anna Koenen, Johannes Onvlee, Henricus Petrus Van Lierop, Robert Dumont, Jacobus Rooda +1 more | 2010-07-13 |
| 7195407 | Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program | Johannes Onvlee, Roel Boumen | 2007-03-27 |
| 7184849 | Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program | Johannes Onvlee, Roel Boumen, Henricus Petrus Van Lierop, Robert Dumont, Jacobus Rooda | 2007-02-27 |
| 7068351 | Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program | Johannes Onvlee, Roel Boumen | 2006-06-27 |