Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8636458 | Integrated post-exposure bake track | Johannes Onvlee, Petrus Rutgerus Bartray, Bernardus Antonius Johannes Luttikhuis, Reinder Teun Plug, Hubert Marie Segers | 2014-01-28 |
| 8634052 | Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table | Jeroen Johannes Sophia Maria Mertens, Frank Bernhard Sperling, Teunis Cornelis van den Dool, Eva Mondt, Alexander Nikolov Zdravkov +1 more | 2014-01-21 |
| 7817241 | Lithographic apparatus and device manufacturing method | Norbertus Josephus Martinus Van Den Nieuwelaar, Johannes Onvlee | 2010-10-19 |
| 7679714 | Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method | Johannes Onvlee, Reinder Teun Plug, Hubert Marie Segers, David Christopher Ockwell, Paul Jacques Van Wijnen | 2010-03-16 |
| 7145643 | Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method | Pieter Johannes Marius Van Groos | 2006-12-05 |
| 6879866 | Method, computer program product and apparatus for scheduling maintenance actions in a substrate processing system | Wim Tjibbe Tel, Harm Rossing | 2005-04-12 |