| 8636458 |
Integrated post-exposure bake track |
Suzan Leonie Auer-Jongepier, Johannes Onvlee, Bernardus Antonius Johannes Luttikhuis, Reinder Teun Plug, Hubert Marie Segers |
2014-01-28 |
| 8289498 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Leon Martin Levasier, Bernardus Antonius Johannes Luttikhuis, Josephus Jacobus Smits, Anthonie Aantjes +7 more |
2012-10-16 |
| 7804584 |
Integrated circuit manufacturing methods with patterning device position determination |
Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +1 more |
2010-09-28 |
| 7522258 |
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination |
Bernardus Antonius Johannes Luttikhuis, Wilhelmus Josephus Box, Marco Koert Stavenga, Thijs Harink |
2009-04-21 |
| 7471373 |
Lithographic apparatus with patterning device position determination |
Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +1 more |
2008-12-30 |
| 7408615 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp |
2008-08-05 |
| 7349067 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp |
2008-03-25 |
| 7345736 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp |
2008-03-18 |
| 7253880 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Antonius Johannes Josephus Van Dijsseldonk, Paulus Martinus Maria Liebregts |
2007-08-07 |
| 7130019 |
Lithographic apparatus and device manufacturing method |
Wilhelmus Josephus Box, Carlo Cornelis Maria Luijten, Bernardus Antonius Johannes Luttikhuis, Michael Ten Bhomer, Ferdy Migchelbrink +1 more |
2006-10-31 |
| 7126664 |
Lithographic apparatus and a device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Johannes Henricus Wilhelmus Jacobs, Thijs Harink, Paulus Martinus Maria Liebregts |
2006-10-24 |
| 5204712 |
Support device with a tiltable object table, and optical lithographic device provided with such a support device |
Adrianus G. Bouwer, Marcel C. M. Baggen, Henricus Wilhelmus Aloysius Janssen, Jan Van Eijk |
1993-04-20 |
