| 6844922 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens |
2005-01-18 |
| 6816238 |
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens |
2004-11-09 |
| 6618122 |
Movable support in a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J. M. Renkens |
2003-09-09 |
| 6603130 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens |
2003-08-05 |
| 6597433 |
Multi-stage drive arrangements and their application in lithographic projection apparatuses |
Michael J. M. Renkens, Johannes C. Driessen, Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel |
2003-07-22 |
| 6445440 |
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens |
2002-09-03 |
| 6421112 |
Movable support in a vacuum chamber and its application in lithographic projection apparatuses |
Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J. M. Renkens |
2002-07-16 |
| 6337484 |
Positioning device and lithographic projection apparatus comprising such a device |
Erik Roelof Loopstra, Henricus Wilhelmus Aloysius Janssen, Harmen Klaas Van Der Schoot |
2002-01-08 |
| 5456134 |
Magnetic transmission mechanism and applications thereof |
Frank Bernhard Sperling |
1995-10-10 |
| 5327060 |
Positioning device using Lorentz forces |
Gerard Van Engelen |
1994-07-05 |
| 5204712 |
Support device with a tiltable object table, and optical lithographic device provided with such a support device |
Marcel C. M. Baggen, Henricus Wilhelmus Aloysius Janssen, Petrus Rutgerus Bartray, Jan Van Eijk |
1993-04-20 |
| 5120034 |
Two-step positioning device using Lorentz forces and a static gas bearing |
Gerard Van Engelen |
1992-06-09 |
| 4737823 |
Opto-lithographic device comprising a displaceable lens system and method of controlling the imaging properties of lens system in such a device |
Guido C. Van De Looy |
1988-04-12 |
| 4698575 |
Positioning device |
— |
1987-10-06 |
| 4655594 |
Displacement device, particularly for the photolithographic treatment of a substrate |
Stefan Wittekoek |
1987-04-07 |
| 4522489 |
Device for photolithographically treating a thin substrate |
— |
1985-06-11 |
