Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7397040 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken | 2008-07-08 |
| 7084953 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken | 2006-08-01 |
| 6844922 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Adrianus G. Bouwer | 2005-01-18 |
| 6816238 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Adrianus G. Bouwer | 2004-11-09 |
| 6774374 | Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Marinus J. J. Dona, Mark Meuwese, Ronald Maarten Schneider +2 more | 2004-08-10 |
| 6740891 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken | 2004-05-25 |
| 6618122 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-09-09 |
| 6603130 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-08-05 |
| 6597433 | Multi-stage drive arrangements and their application in lithographic projection apparatuses | Michael J. M. Renkens, Adrianus G. Bouwer, Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel | 2003-07-22 |
| 6445440 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-09-03 |
| 6421112 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-07-16 |
| 5878495 | Method of manufacturing a dynamic groove bearing by means of a metal-removing tool, and data storage unit provided with such a dynamic groove bearing | Peter Martens | 1999-03-09 |
| 5726526 | Display device having a support structure for a wire cathode | Peter Martens, Antonius Johannes Josephus Rademakers, Petrus H. F. Trompenaars, Theunis S. Baller, Gerardus G. P. Van Gorkom +3 more | 1998-03-10 |
| 5216737 | Optoelectronic device comprising a semiconductor laser and an optical isolator | Jan W. Kokkelink, Hendricus F. J. J. Van Tongeren | 1993-06-01 |
| 4347441 | Dual probe interferometer for object profile measuring | Jan G. Dil, Wichert Mesman | 1982-08-31 |