Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8129702 | Radiation system with contamination barrier | Levinus Pieter Bakker, Marcel Mathijs Theodore Marie Dierichs, Johannes Maria Freriks, Frank Jeroen Pieter Schuurmans, Wilhelmus Josephus Box | 2012-03-06 |
| 7737425 | Contamination barrier with expandable lamellas | Levinus Pieter Bakker, Marcel Mathijs Theodore Marie Dierichs, Johannes Maria Freriks, Frank Jeroen Pieter Schuurmans, Wilhelmus Josephus Box | 2010-06-15 |
| 7247866 | Contamination barrier with expandable lamellas | Levinus Pieter Bakker, Marcel Mathijs Theodore Marie Dierichs, Johannes Maria Freriks, Frank Jeroen Pieter Schuurmans, Wilhelmus Josephus Box | 2007-07-24 |
| 6903805 | Lithographic apparatus and device manufacturing method | Ronald Maarten Schneider | 2005-06-07 |
| 6844922 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2005-01-18 |
| 6816238 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2004-11-09 |
| 6774374 | Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses | Johannes C. Driessen, Theodorus Hubertus Josephus Bisschops, Marinus J. J. Dona, Mark Meuwese, Ronald Maarten Schneider +2 more | 2004-08-10 |
| 6747731 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Eric W. A. Janssen, Marcel J. M. Renkens, Ronald Maarten Schneider, Theo H. J. Bisschops, Rob Tabor | 2004-06-08 |
| 6618122 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-09-09 |
| 6603130 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-08-05 |
| 6597433 | Multi-stage drive arrangements and their application in lithographic projection apparatuses | Michael J. M. Renkens, Adrianus G. Bouwer, Johannes C. Driessen, Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers | 2003-07-22 |
| 6597429 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Eric W. A. Janssen, Marcel J. M. Renkens, Ronald Maarten Schneider, Theo H. J. Bisschops, Rob Tabor | 2003-07-22 |
| 6445440 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-09-03 |
| 6421112 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-07-16 |
| 5971628 | Holder for optoelectronic device having connection pins bent toward a connection means | Marinus J. J. Dona, Doeke Jolt Oostra, Remigius S. M. Van Roemburg | 1999-10-26 |
| 5818318 | Magnetic clamping device | Henricus J. Ligthart, Petrus H. W. Swinkels | 1998-10-06 |
| 5441442 | Method of manufacturing a plate having a plane main surface, method of manufacturing a plate having parallel main surfaces, and device suitable for implementing said methods | Jan Haisma, Peter W. De Haas, Franciscus J. H. M. Van Der Kruis | 1995-08-15 |
| 5397185 | Device for the axial support of a rotatable body, and positioning device provided with such a device | Mark Meuwese, Cornelis J. M. Naus | 1995-03-14 |