| 10345712 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2019-07-09 |
| 10146142 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2018-12-04 |
| 9964858 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman |
2018-05-08 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2018-04-24 |
| 9778574 |
Apparatus, a device and a device manufacturing method |
Sander Catharina Reinier Derks, Eric Willem Felix Casimiri, Sumant Sukdew Ramanujan Oemrawsingh, Wilhelmus Theodorus Anthonius Johannes Van Den Einden, Johannes Fransiscus Maria Velthuis +2 more |
2017-10-03 |
| 9606448 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2017-03-28 |
| 9581914 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-02-28 |
| 9442388 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2016-09-13 |
| 9188881 |
Lithographic apparatus and method for reducing stray radiation |
Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Antonie Hendrik Verweij |
2015-11-17 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9110389 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman |
2015-08-18 |
| 9025127 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-05-05 |
| 8953144 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-02-10 |
| 8755027 |
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid |
Matthew Lipson, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk, Ronald A. Wilklow +1 more |
2014-06-17 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2014-01-21 |
| 8629971 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-14 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2013-10-01 |
| 8508716 |
Homogenizer |
Bert Claessens, Herman Philip Godfried |
2013-08-13 |
| 8416385 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Wendy Fransisca Johanna Gehoel-Van Ansem |
2013-04-09 |
| 8363208 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman |
2013-01-29 |
| 8345225 |
Controllable radiation lithographic apparatus and method |
Johannes Onvlee |
2013-01-01 |
| 8279405 |
Lithographic apparatus and device manufacturing method |
Hans Van Der Laan, Hendrikus Robertus Marie Van Greevenbroek |
2012-10-02 |
| 8252487 |
Device manufacturing method and mask for use therein |
Markus Franciscus Antonius Eurlings, Donis Flagello |
2012-08-28 |
| 8208123 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Johannes Christiaan Maria Jasper, Hendricus Johannes Maria Meijer, Uwe Mickan +3 more |
2012-06-26 |